Microstructure and Properties of Cr-Doped Graphite Carbon Films Prepared by Unbalanced Magnetron Sputtering

DOI: https://doi.org/10.62517/jes.202502215

Author(s)

Yongmei Wang1*, Sihua Zhou1, Xiaodong Zhou2, Songfeng Zhang2

Affiliation(s)

1School of Physics and Telecommunication Engineering, Zhoukou Normal University, Zhoukou, Henan, China 2School of Mechanical and Electrical Engineering, Zhoukou Normal University, Zhoukou, Henan, China *Corresponding Author

Abstract

Preparation of graphite-like (GLC) films using unbalanced magnetron sputtering technology. The investigation of their microstructure properties, mechanical properties, and tribological properties were studied. The introduction of a small amount of chromium into the graphite-like (Gr-GLC) films not only maintains their high hardness, low friction coefficient, low wear rate, and high load-bearing capacity but also results in a decrease in the friction coefficient as the load increases. Additionally, metallic chromium in the coating enhances toughness and anti-oxidation properties, significantly improving the comprehensive performance of the coating.

Keywords

Magnetron Sputtering; GLC Films; Doped with Cr; Mechanical Properties

References

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